The “impossible” atomic physics that make sure ASML’s machines don’t break. This talk will be all about the atomic physics at the heart of EUV nanolithography machines: from generating EUV light by shooting lasers at tin droplets creating a Laser-Produced Plasma (LPP) to the seemingly impossible collisions taking place in the H2 buffer gas that protects the machines from the violent tin plasmas. The talk is given by Emiel de Wit. EROs: Emma and Emily